Critical Parts Cleaning

for Next Generation Technology

Over 50 years of experience meeting the unique challenges of world-leading Semiconductor equipment manufacturers and premier research institutions.

TMPI has earned its reputation as the leader in outsourced Ultra-High Vacuum (UHV),  Critical DUV, and EUV parts cleaning services.

Interested in Service?

Request a Quote Today.

Request a Quote

Request a quote for the parts that require cleaning or maintenance.

Please be sure to note any specific cleaning processes required and include all cleaning specification documents, outline drawings, or prints provided by the manufacturer.

Used parts must be approved prior to sending to TMPI and include a completed Processing Questionnaire.

Submit a Purchase Order

After finalizing the details of the requested services, TMPI will send a sales order for your approval.

Based on your requirements, TMPI will present you with an estimated completion timeline. If expedited services are required, please email to determine availability.

Once confirmed, please submit a purchase order for service.

Receive Service

Once TMPI has received your order, it will be processed to the exact specifications outlined on the purchase order and TMPI's Terms & Conditions.

If you require courier or packaging services, please contact for a quote.

After an order is processed, pre-shipment documents will be emailed to our point-of-contact to arrange pick up or delivery.

Featured Service


Creates a layer of protective film on the parts that inhibits corrosion

Experience Superior Service

High quality image of a chamber

From Ultra-High Vacuum (UHV) components to custom systems, Thermionics Laboratory, Inc. provides elegant solutions to meet the needs of the scientific community.

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Precision Cleaning Services

TMPI specializes in new and used critical parts cleaning for the Semiconductor industry.

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Cleanroom environment

Preventive maintenance and parts cleaning services ensure that more of your time is spent focused on research with minimum disruption and downtime while reducing and eliminating cross-contamination of sensitive instruments.

TMPI helps customers achieve:

  • Higher Yields

  • Lower Costs

  • Consistent Results

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UHV Chambers & Accessories
Experts in Ultra-High Vacuum Equipment
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Thermionics Laboratory, Inc.

Founded in 1958, Thermionics provides innovative Ultra-High Vacuum solutions to premier academic, scientific and research institutions around the world. TLI understands each customer’s unique requirements and designs equipment and processes that set new standards of precision and durability.

Our Research Clients Include:

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